9-38
Positional deviation measurement
9
Model 1
Reference image
(Model 1)
Search area
(Model 1)
Model 2
Reference image (model 2)
Search area (model 2)
1
MEAS WINDOW (MDL0)
(measurement window)
3
SEARCH AREA (MDL0)
2
REF IMAGE (MODEL0)
(reference images)
4
DTECT COORD (MDL0)
(detection coordinates)
5
CONTR. PIXEL (MDL0)
(pixel contraction)
q
DETECT ACCURANCY
(accuracy of detection)
w
UPPER MENU
1
MEAS WINDOW (MDL0)
(measurement window)
3
SEARCH AREA (MDL0)
2
REF IMAGE (MODEL1)
(reference images)
4
DTECT COORD (MDL0)
(detection coordinates)
5
CONTR. PIXEL (MDL0)
(pixel contraction)
6
MEAS WINDOW (MDL1)
(measurement window)
7
REF IMAGE (MODEL1)
(reference images)
8
SEARCH AREA
(MDL1)
9
DTECT COORD (MDL1)
(detection coordinates)
0
CONTR. PIXEL(MDL1)
(pixel contraction)
q
DETECT ACCURANCY
(accuracy of detection)
Go to page 9·41
Returns you to the [MEASURING COND]
If you specified a 1P-SCH (1-point search) or a 2P-SCH (2-point
search), select item
5
UPPER MENU.
If you specified a 1P-SCH + 1P-EDGE (1-point 1-point edge),
select item
4
EDGE DETECT COND (edge detection conditions).
Continued on the
following page
Continued from the previous page
Specify a 1P-SCH (1-point search), a 2P-SCH (2-point search), or a 1P-SCH+1P-EDGE (1-point
1-point edge)
[The setting sequence for the gray scale search conditions]
· This is the sequence of events when a 1-point search or a 1-point 1-point edge is selected.
· This is the sequence of events when a 2-point search is selected.
w
UPPER MENU
[Information about the recording of a reference image]
In order to record a reference image it is necessary to use the freeze frame.
The specifications for the windows are as follows.
· In the case of a rectangular window
· In the case of a horizontal line
· In the case of a vertical line
When using either a horizontal or vertical line, please bear the following in mind.
The length of the reference image must be less than that of the search area.
[An example of recording]
· This example is of a 2-point search in a rectangular measurement window.
· For an example of a horizontal or vertical line measurement window, see page 9·50.
Reference image
Search area
Line type
Solid line
Dotted line
Movement
Units of 4 pixels
Units of 4 pixels
Size
Units of 4 pixels
Units of 4 pixels
Minimum
32 x 32 (pixels)
32 x 32 (pixels)
Maximum
X
x
Y (X
x
Y=65536 pixels)
512
x
480 pixels
Reference image
Search area
Line type
Solid line
Dotted line
Movement
In a horizontal direction: units of 4 pixels
In a vertical direction: units of 1 pixel
Length
Units of 4
pixels
Minimum length
8 pixels
Maximum length
512 pixels
Reference image
Search area
Line type
Solid line
Dotted line
Movement
In a horizontal direction: units of 1 pixel
In a vertical direction: units of 4 pixels
Length
Units of 4
pixels
Minimum length
8 pixels
Maximum length
480 pixels