9-41
Positional deviation measurement
9
Continued on the following page
Select item
5
EVALUATION COND (evaluation conditions),on the [TYPE00-MEAS0] menu.
Return to the [TYPE00-MEAS0] and select item
6
NUMERIC
CALC COND (conditions for numerical calculations)
· Items
7
ANGULAR DEVIT, to
q
Y DEVIAT (MDL1), are displayed when you specify a
2P-SCH (2-point search), 2P-EDGE (2-point edge) or a 1P-SCH + 1P-EDGE (1-point
1-point edge).
· Item
6
MATCH (MDL0), is displayed when you specify a 1P-SCH (1-point search),
2P-SCH (2-point search) or a 1P-SCH + 1P-EDGE (1-point 1-point edge).
· Item
w
MATCH (MDL1), is displayed when a 2P-SCH (2-point search) is specified.
[EVALUATION COND] (TYPE00-MEAS.0-POS-DEVIATION)
1
REGST NO.
0(0~7)
[TEST RESULT]
[OUT]
2
X COORD.(MDL0) 000.0~511.0
X=000.0
OK
NO
3
Y
COORD.(MDL0)
000.0~479.0
Y=000.0
OK
NO
4
X DEVIAT(MDL0)
000.0~511.0
X=000.0
OK
NO
5
Y DEVIAT(MDL0)
000.0~479.0
Y=000.0
OK
NO
6
MATCH (MDL0)
−
10000~+10000+09000
OK
NO
7
ANGULAR DEVIT
−
180.0~+180.0
+010.0
°
OK
NO
8
X COORD.(MDL1) 000.0~511.0
X=000.0
OK
NO
9
Y
COORD.(MDL1)
000.0~479.0
Y=000.0
OK
NO
0
X DEVIAT(MDL1)
000.0~511.0
X=000.0
OK
NO
q
Y DEVIAT(MDL1)
000.0~479.0
Y=000.0
OK
NO
w
MATCH (MDL1)
−
10000~+10000+09000
OK
NO
e
MAKE A TEST RUN (SET KEY)
r
UPPER MENU
These displays can be set
using the up and down keys.
(The choices are NO, Y0 to 7,
C000 to C127)
From page 9·38: When you specify a 1P-SCH (1-point search) or a 2P-SCH (2-point search)
From the previous page: When you specify a 1P-EDGE (1-point edge), 2P-EDGE (2-point edge) or a
1P-SCH + 1P-EDGE (1-point 1-point edge) for the MODE.
* The X and Y coordinates come from either the point of detection in the reference
image or from the point at which the edge was detected in the target image.
· Verify your settings by testing the upper and lower limits for decisions that you have set.
This can be done using item
e
MAKE A TEST RUN (make a test run).
· For more information about evaluation condition, see section 9-2 [3] Evaluation conditions.
Evaluation condition
1
REGST NO. (registration number )
2
X COORD. (MDL0)
(X coordinates)
3
Y COORD. (MDL0)
(Y coordinates)
4
X DEVIAT (MDL0)
(range of X deviation)
5
Y DEVIAT (MDL0)
(range of Y deviation)
6
MATCH (MDL0)
(degree of match with the reference image)
7
ANGULAR DEVIT
(angular deviation)
8
X COORD. (MDL1) (X coordinates)
9
Y COORD. (MDL1) (Y coordinates)
q
X DEVIAT (MDL1)
(range of X deviation)
w
Y DEVIAT (MDL1)
(range of Y deviation)
e
MATCH (MDL1)
(degree of match with the reference image)
r
MAKE A
TEST RUN
t
UPPER MENU
Setting details
Enter any number from 0 to 7.
Enter the range of X* coordinates for model 0 which will produce an
OK decision.
Enter the range of Y* coordinates for model 0 which will produce an
OK decision.
Enter the maximum amount of difference in the X direction in model
0 which will still produce an OK decision.
Enter the maximum amount of difference in the Y direction in model
0 which will still produce an OK decision.
Enter the percentage of pixels that must match the reference image
for model 0 which will still produce an OK decision.
Set the amount of angular displacement for models 0 and 1 that will
still produce an OK decision.
Set these items for model 1 just the same way as item
②
to
⑥
above.
Pressing the SET key will test the evaluation condition, display the test results.
This will return you to the [TYPE-MEAS0] menu.