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Chapter 3 Operation Details
36
3.7
Adjusting the Focus (for focus operation)
3.7.1
Using the coarse/fine focus knob
Focus on the sample lifting/lowering the revolving
nosepiece with the fine/coarse focus knob.
The relationship between the direction of coarse/fine
focus knob rotation and the revolving nosepiece
vertical movement is shown in the figure. To raise the
revolving nosepiece, turn the knob forward.
•
One revolution of the coarse focus knob drives the
revolving nosepiece approximately 4.0 mm.
•
One revolution of the fine focus knob drives the
revolving nosepiece approximately 0.1 mm.
•
The fine focus knob is marked in 1
μ
m.
•
The coarse/fine focus stroke (the vertical movable
range of the revolving nosepiece) is 4 mm. (±2
mm: top datum surface for stage)
To raise the revolving nosepiece, turn the knob forward.
Figure 3.7-1 Relationship between focus knob
rotation and revolving nosepiece vertical movement
Do not attempt following operations, because
doing so may cause the product failure.
•
Turning the left and right knobs in opposite
directions at the same time.
•
Keep turning the coarse/fine knobs after hitting
the limits.
3.7.2
Adjusting the torque for the coarse focus ring
Figure 3.7-2 Adjusting the torque
for the coarse focus ring
The rotational stiffness of the coarse focus knob can
be adjusted as follows.
To make it stiffer, turn the coarse torque adjustment
ring behind the coarse focus knob in the direction of
the arrow indicated in the figure.
To make it looser, turn the knob in the opposite
direction.
Coarse torque adjustment ring
Stiffer
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