CENTROTHERM E1200 HT 260-3, Руководство по эксплуатации

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E1200 HT 260-3
2BSafety
23.04.07
00401010_41087
3-1
3 Safety
3.1 Correct Use
The equipment is used for thermo-chemical treatment of silicon substrates, which are
called wafers in these operating instructions (OI). For further information on the thermo-
chemical processes for your equipment, please refer to the process overview for
horizontal furnaces in chapter 12.2 Drawings, Circuit Diagrams, Overviews, page 12-1.
This is valid within the scope of the limiting values and statements described in chapter
2 Introduction, page 2-1, as well as the conditions determined by individual contract.
In addition, observe the following for operation:
—
all notes in the OIs,
—
the accepted technical rules,
—
all relevant laws, standards and regulations.
3.2 Incorrect Use
Any use beyond the use described above is considered as incorrect. The manufacturer
does not accept liability for personal injuries or damages resulting from such use.
3.3 General Safety Instructions
The equipment was built in correspondence with all binding regulations in law and all
safety regulations. It is state of the art and fulfills the EC conformity requests.
Nevertheless the system can endanger people and assets when it is used improperly
or for other purposes than intended. The user has to make sure that everyone who
works on the subassembly resp. on the equipment has read and understood chapter
3 Safety, page 3-1 of these OIs.
Observe the following safety instructions to avoid dangers for persons and/or assets:
—
The operating company has to provide the whole necessary protective equipment
for the operating personnel.
—
Implementing corresponding instructions and controls the operating company has
to make sure that the equipment's resp. the assembly group's workstations are
always clean.
In addition, the local safety regulations and rules for prevention of accidents have to be
observed when operating the assembly group resp. the equipment.