CENTROTHERM E1200 HT 260-3, Руководство по эксплуатации

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E1200 HT 260-3
8BMaintenance
23.04.07
9-70
00401010_41087
9.11.2.2 Test for Internal Leaks
1. Thoroughly purge the gas system for two hours at 200 to 500 mTorr.
2. Close all manually and compressed air operated valves on all stacks of the
equipment.
3. Connect the leak tester to the gas system's gas outlet at the process tube
connection on stack 1.
4. Connect all gas line inlets to the helium supply.
5. Set the pressure reducing valves to a working pressure of 1 - 3 bar.
6. Open all manually and compressed air operated valves of gas line 1 except for the
first valve, counted from the gas inlet.
7. Set all MFC setpoints to maximum value.
8. Wait for ten minutes. Check the leak rate. The leak rate must be below 3 • 10
- 8
l
mbar/s.
—
If the leak rate lower, the leakage test is passed.
—
If the leak rate is higher, repair the leak and repeat from step 3.
9. Log the leak rate.
10. Close valve 2 of gas line 1 counted from the gas inlet and open valve 1.
11. Wait for one minute. Check the leak rate. The leak rate must be below 3 • 10
- 8
l
mbar/s.
—
If the leak rate lower, the leakage test is passed.
—
If the leak rate is higher, repair the leak and repeat from step 9.
12. Log the leak rate.
13. Close valve n +1 of gas line 1 counted from the gas inlet and open valve n.
14. Wait for one minute. Check the leak rate. The leak rate must be below 3 • 10
- 8
l
mbar/s.
—
If the leak rate lower, the leakage test is passed.
—
If the leak rate is higher, repair the leak and repeat from step 13.
15. Log the leak rate.
16. Check all valves of gas line 1 accordingly.
17. Repeat the test procedure for gas line n+1 from point 5 and continue until all gas
lines at stack 1 are checked.
18. Carry out the leakage test for the other stacks.