CENTROTHERM E1200 HT 260-3, Руководство по эксплуатации

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E1200 HT 260-3
9BPreventive Maintenance
23.04.07
00401010_41087
10-7
10.6 Daily Procedures
10.6.1 Checking the Process Boat Contacts
Check the process boat contacts for deposits every day and after each wafer crash.
Contaminations impair the HF power.
Clean the contact holes of the process boat contacts if they are not black.
Wear safety gloves when cleaning the process boat contacts.
Avoid process boat contamination.
Use a lint-free and dry cleaning cloth to clean the contaminated contact holes of the
process boat contacts.
10.6.2 Removing Broken Wafer Parts
Only use a vacuum cleaner which meets the dust class H requirements of DIN EN
60335-2-69/IEC 60335-3-69, safety cleaner or cleaner for dangerous materials with an
efficiency rate of > 99.995 % to clean the equipment. If the equipment is operated in a
clean room, the vacuum cleaner also has to meet all applicable clean room
requirements.
Use a vacuum cleaner to remove broken wafers from within the equipment's loading
station.
10.6.3 Checking the Protocol Entries at the Cell Controller
Check the protocol for fault messages such as CMS alarms and the device alarms of
the CESAR control computer alarms and eliminate possible sources of errors. The
process protocol and the direct process results indicate arising problems at an early
stage.
10.6.4 Checking the Zone Heating Current on the CMI Operating Panel
Use the bar chart to check the zone heating currents. Check for current in all heating
zones.