Veeco MPS-3000 CE, Technical Manual

Page: 74 / 96

To avoid electrical shock, keep clear of “live” circuits. Follow all local lock-out/tag-out procedures before continuing. Disconnect the
controller’s main power before troubleshooting any electrical connection.
WARNING
70
Table 10.2: Error Code Definitions
Error
Code Definition
Probable Cause Suggested Remedy
E01
The keeper voltage has dropped below 100V
but has not dropped below the keeper volt-
age limit. Applies to both hollow cathode and
hollow cathode neutralizer power supplies.
Insufficient gas flow. Raise the gas flow.
The keeper voltage does not drop below the
keeper voltage limit (MPS-3000 CE HC unit). The keeper voltage limit is set too low.
Raise the keeper voltage limit.
E02
The discharge current has reached the pro-
grammed discharge current limit.
Insufficient gas flow. Raise the gas flow.
Discharge current limit set too low. Raise the limit.
E03
The operating value is low and is unable to
increase to meet the requested target.
Power into the power supply is low. Cycle the power.
A power supply fuse has failed.
Check the fuses on the Power Board.
Refer to “Maintenance” on page 65 for
fuse replacement.
Facility voltage is low. Raise facility voltage.
If the error message is on the neutralizer, the neutralizer
filament may be open (When SW1-4 is in the on posi-
tion on the controller board, an open filament is not a
Fatal error).
Replace the neutralizer filament.
E04
The operating parameter is high and may not
be reduced to target value.
Requested target value is below operational limits. Increase the target value.
E05 Current Limit.
Requested target value is above the maximum current
capability of the power supply.
Reduce the requested target value.
The output is shorted.
Check the ion beam source and cable
connections (refer to the ion source
technical manual).
A power supply has failed.
Contact “Service Support” on page 73
to arrange for factory repair.