Veeco MPS-3000 CE, Technical Manual

Page: 43 / 96

39
d. Increase the gas flow to the ion beam source by about 1sccm and
repeat Step c.
•
If necessary, repeat Steps c. through d. until a flow rate of
10sccm or a chamber pressure of 6.7 x 10
-2
Pa (5 x 10
-4
Torr)
is reached.
• If the discharge still will not start, refer to the “Troubleshooting/
Error Code Definitions” on page 69 and to the ion source
technical manual.
11. Select the beam voltage. For initial start-up purposes, use a value of
1000V.
a. Select the beam power supply with the MODULE switch. Voltage
will automatically be selected in the Manual mode. The words
BEAM and VOLTAGE appear above the appropriate switches.
b. Enter the chosen voltage by turning the Adjust knob. The changing
values appears on the Beam Voltage display.
c. The beam voltage is entered automatically into the selected mem-
ory as the Adjust knob is turned.
12. Set the A/B Ratio.
The recommended and factory-set A/B Ratio is 10% for all sources.
a. Select the Accelerator power supply with the MODULE switch. The
letters ACCEL appear above the switch.
b. Select the A/B Ratio with the FUNCTION switch. The letters A/B
appear above the switch.
c. Use the Adjust knob to select the accelerator-current-to-beam-cur-
rent ratio. The A/B Ratio will appear in the Accelerator Voltage dis-
play.
d. The final selected ratio is stored automatically in the memory, as
indicated above the MEMORY switch.
13. Select the accelerator voltage. For initial start-up purposes, use a value
of 250V.
a. Select the Accelerator power supply with the MODULE switch and
Voltage with the FUNCTION switch. The words ACCEL and VOLT-
AGE appear above the appropriate switches.
b. Enter the chosen voltage by turning the Adjust knob. The changing
value appears on the Accelerator Voltage display.
c. The accelerator voltage is entered automatically into the selected
memory as the Adjust knob is turned.
14. Start the ion beam.
To avoid electrical shock, keep clear of “live” circuits.
NOTE
WARNING