Veeco MPS-3000 CE, Technical Manual

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MPS-3000 CE HC
Before beginning HC power supply operation, check the following:
• The appropriate ion beam source has been properly installed
in the vacuum system.
• The vacuum system pressure is 4 x 10
-2
Pa (3 x 10
-4
Torr) or
lower.
• Sufficient gas flow is introduced into the ion beam source,
internal HC, and internal HCN for appropriate operation.
Refer to the ion source’s technical manual for installation and operation
information.
HC Start-up
1. Turn the facility mains breaker and the unit’s POWER switch (on the
power supply front) to the on position.
a. The fan will start.
b. Random displays will appear, and the audio alarm will sound. This
condition will last about one second.
•
The controller will self-test each of the power supplies (from
right to left). A power supply has been tested when the letter P
appears in the top display.
c. A click will be heard when the main contactor energizes after about
six seconds.
d. The unit is ready to operate an ion source after each power supply
has been tested.
2. Follow these steps to operate the power supply in Manual mode.
a. Turn the KEYLOCK switch to the Mode Enable position.
b. Select Manual using the MODE switch. The word MANUAL
appears above the switch indicating that Manual mode has been
selected.
c. To lock the power supply in Manual mode, turn the KEYLOCK
switch to the disable position and remove the key.
3. Use the MEMORY switch to select the memory location the power sup-
ply will use to store parameters; the selected memory location will
appear above the switch.
NOTE