Veeco MPS-3000 CE, Technical Manual

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Command Name: BEAM ON/OFF
Syntax: B[n]<cr>
Units: N/S
Range: n = 1 or 0
Description: Used to turn the beam supply on (B1) or off (B0).
Turn the beam supply on using the following command: B1<cr>
Command Name: SET BEAM CURRENT TOLERANCE LIMIT
Syntax: BE[n]<cr>
Units: %
Range: n = 0 - 99
Description: Sets the beam current tolerance limit. When the beam is on
and the power supply is not in Manual mode, check that the beam current
remains within the specified limit.
If it is out of tolerance for more than one second, the beam will be
turned off and an E13 error message will appear in the beam current
display.
To disable this feature, send the following command to the power sup-
ply BE0<cr>.
Set the beam current tolerance limit to 5% using the following command:
BE5<cr>
Command Name: SET BEAM CURRENT
Syntax: BI[n]<cr>
Units: mA
Range: n = 0 - 300
Description: Sets the target value for the beam current. When the beam is
on and the power supply is not in Manual mode, the beam current will
ramp to this value.
Set the beam current to 200mA using the following command: BI200<cr>
EXAMPLE 8.6 Turn
the Beam Supply On
EXAMPLE 8.7 Set the
Beam Current Toler-
ance Limit
EXAMPLE 8.8 Set the
Beam Current