Veeco MPS-3000 CE, Technical Manual

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35
HC Recalling Operating Conditions
Selecting RCL with the MEMORY switch allows the user to view the operat-
ing conditions stored in the unused memory location. After about four sec-
onds, the original parameters will be displayed.
MPS-3000 CE PBN
Before beginning PBN power supply operation, check the following:
• The ion beam source has been properly installed in the vac-
uum system.
• The vacuum system pressure is 4 x 10
-2
Pa (3 x 10
-4
Torr) or
lower.
• Sufficient gas flow introduced into the ion beam source and
internal PBN for appropriate operation.
Refer to the ion source’s technical manual for installation and operation
information.
PBN Start-up
1. Turn the facility mains breaker and the unit’s POWER switch (on the
power supply front) to the on position.
a. The fan will start.
b. Random displays will appear, and the audio alarm will sound. This
condition lasts about one second.
•
The controller will self-test each of the power supplies (from
right to left). The letter P on the top display indicates a tested
power supply.
c. A click will be heard when the main contactor energizes after about
six seconds.
d. The unit is ready to operate an ion source after each power supply
has been tested.
2. Follow these steps to operate the power supply in Manual mode.
a. Turn the KEYLOCK switch to the Mode Enable position.
b. Select Manual using the MODE switch. The word MANUAL
appears above the switch when Manual mode has been selected.
c. To lock the power supply in Manual mode, turn the KEYLOCK
switch to the disable position and remove the key.
NOTE