Veeco MPS-3000 CE, Technical Manual

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Appendix A: Specifications
General
The MPS-3000 CE consists of a chassis containing these power supplies:
• beam voltage
• accelerator voltage
Each chassis contains one current supply from each of the following two
groups, depending on the end use:
1. cathode
• filament
• hollow (HC)
2. neutralizer
• filament
• hollow cathode (HCN)
• plasma bridge (PBN)
Each chassis also contains one of two discharge supply types, depending
on the end use:
• voltage (FC, PBN)
• current (HC)
The unit is designed for continuous operation. The power supply is CE
marked and its nameplate includes the following information:
Veeco Instruments Inc.
Terminal Drive
Plainview, NY 11803 USA
Product Name: Power Supply
Model:MPS3000LLL
Rev: L
Serial Number: LLNNNNNN
Input Voltage: 230V
~
50 Hz 1 Phase
10A Max