Veeco MPS-3000 CE, Technical Manual

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21
On - In the on position, the Discharge power supply will turn on
without a neutralizer filament current present. The purpose of this
switch is to allow operation of an ion source without a neutralizer
current. Request zero neutralizer filament current when the Neutral-
izer Fault Switch is in the on position.
Off - In the off position, the discharge, beam, and accelerator out-
puts will be held low until the neutralizer filament current is within
0.5A of the target value and the cathode current is greater than
0.75A. Start-up of the ion source will not be possible if the neutral-
izer filament is open; the outputs of all power supplies will be shut-
down if the filament fails during ion source operation. When an
open filament is detected, an intermittent audio alarm will sound,
an E23 error message appears on the Neutralizer Filament Current
display, and all other displays will be dark. The SOURCE and
BEAM switches will be inoperative until the neutralizer fault has
been corrected and the power has been cycled.
MPS-3000 CE HC and PBN
On - In the on position, the entire neutralizer supply is kept off.
Off - In the off position, the requested emission current is com-
pared to the beam current. In Local, Local Restricted, or Remote
mode, the emission current will automatically track the beam cur-
rent, with the emission being 125% or 200% of the beam current. If
the emission current is below 100% of the beam current, an E24
error message appears on the HCN Emission/Heater display, an
audio alarm will sound (if enabled), and the BEAM switch will be
turned off.
SW1-5, SW1-6:
Selects the baud rate. Baud rate represents the speed that the power
supply will communicate to an external computer through an EIA-232
interface.
The baud rate is factory preset to 9600 bps.
SW1-7:
Selects the emission-current-to-beam-current ratio in Local or Remote
mode.
Baud Rate SW 1- 5 SW 1- 6
9600 On Off
4800 Off On
2400 On On
1200 Off Off
NOTE