Veeco MPS-3000 CE, Technical Manual

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Chapter 10: Troubleshooting/Error Code Definitions
To avoid electrical shock, keep clear of “live” circuits. Follow all local lock-out/ tag-out procedures, before repairing or replacing
any electrical devices. Disconnect the unit’s main power before replacing any fuse or troubleshooting any electrical connection.
Table 10.1: MPS-3000 CE Power Supply Troubleshooting
Problem Possible Cause Remedy
Front panel displays will not light,
fan will not start.
The power cord is not plugged in. Connect the power cord.
The unit’s CB1 circuit breaker on rear panel is tripped. Close circuit breaker on the unit’s rear panel.
The power plug is wired incorrectly. Correctly wire the power plug.
Front panel displays light. Fan
starts. An E20 error message
appears on all upper displays. The external interlock string in not complete. Complete the interlock string.
An E22 error message appears on
the cathode module (MPS-3000
CE FC power supply only).
Open cathode filament. Replace the filament. See “Maintenance” on page 65 .
Cable is not connected Connect the cable.
An E23 error message appears on
the neutralizer module (MPS-3000
CE FC/PBN power supply only).
Open neutralizer filament. Replace the filament. See “Maintenance” on page 65 .
Cable is not connected. Connect the cable.
The ion source discharge will not
start.
The Body Fuse (F9) is open.
Replace the fuse with the correct value (refer to “Main-
tenance” on page 65 ), and check that the source body
is not grounded through cable connections or internal
connections.
Accelerator displays no current or a
very small current.
If the Accelerator output is shorted to the discharge output
(the anode) while the high voltage is on, damage to an
accelerator series resistor may result. When this occurs,
the Accelerator Current display will show zero current and
the Accelerator Voltage display will show the programmed
value. No accelerator voltage will be present at the source
connector (P33-F) on the unit’s rear panel.
Replace the resistor if damaged. Contact “Service Sup-
port” on page 73.
Power supply fails to retain stored
parameters in memory. Battery is low.
Internal circuitry or a component is damaged.
Contact “Service Support” on page 73.
WARNING