Veeco MPS-3000 CE, Technical Manual

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• 100mA maximum.
• Over-voltage protection.
• Current limit protection.
• Programmable accelerator-current-to-beam-current ratio limit.
• Voltage and current readouts.
• Thermal protection.
Plasma Bridge Neutralizer Current Supply:
• 0-10A AC Filament Supply.
• 0-600mA DC Emission Supply.
• 200mA DC Body Supply.
• Programmable filament current limit.
• Soft start.
• Current limit protection.
• Filament current and emission current readouts.
• Body voltage readout.
• Thermal protection.
Programmed Limit Values
The above limits are programmed into the power supplies at the factory.
The PBN filament current limit is set for tungsten wire, 0.25mm (0.010 in.),
but the preset A/B Ratio limit is the recommended value for operation of all
ion sources. Although the above are the recommended limits programmed
Table A.1: Programmed Limit Values
Parameter Default Value
Cathode Filament Current Limit
Set at 6.5A for 5cm or smaller
ion source
Hollow Cathode Keeper Voltage Limit Set at 25V
Neutralizer Filament Current Limit Set at 6.5V
Hollow Cathode Neutralizer Keeper
Voltage Limit
Set at 25V
A/B Ratio Limit 10%
Plasma Bridge Neutralizer Filament
Current Limit
6.5V
Discharge Current Limit 2.0A