Calibration, Maintenance, Troubleshooting and Warranty
Vertical Engagement Scanners—Installation, Use, and Maintenance
Rev. B
MultiMode SPM Instruction Manual
329
15.16
Vertical Engagement Scanners—Installation, Use,
and Maintenance
Figure 15.16a
MultiMode Scanner
Veeco now offers “E” and “J” scanners which permit vertical engagement without signi
fi
cant lateral
movement. The vertical scanners feature the following:
•
Completely motorized tip-sample engage.
•
Fully vertical engage head does not tilt.
•
Easy to locate tip on desired scan area.
•
0.5µm lateral repeatability on subsequent engages.
•
Accommodates samples up to 8.0mm thick.
•
Integrated
fl
uid seal at top of scanner resists
fl
uid spillage.
•
Retaining springs mount permanently to scanner body.
Your vertical scanner should come shipped with the following:
•
XXXXJV.SCN (“J” scanners) or XXXXEV.SCN (“E” scanners) parameter
fi
le on CD.
•
Stabilizing screw, P/N 130-000-145
In addition, you will require a calibration reference, such as a P/N 498-000-025.
