Calibration, Maintenance, Troubleshooting and Warranty
Autocalibration
Rev. B
MultiMode SPM Instruction Manual
293
3. Use the mouse to draw a line on the image. The line should be drawn to span as many
features as possible, preferably connecting similar edges. For example, consider the
following:
In this example, a line is drawn from the bottom edge of one feature to the bottom edge of another
feature four rows away—a distance of 40µm. The control monitor simultaneously displays a dialog
box for entering the distance indicated by the white line:
The distance displayed in the box (in this example, 35.95µm) is the software’s estimate (based on
current calibration values) of the length of the line drawn on the image. If the line length is different
from the value shown, change the value to re
fl
ect the correct line length. (In this example, the user
would enter a value of
40
.)
4. Enter the distance covered by the white line drawn on the image. If a 10µm reference is being
employed, like portions of features are spaced 10µm apart (e.g., between bottom edges, left
sides, etc.).
Note:
Measure features without regard to how they appear in calibration images.
Features may be represented as having stretched, distorted, or angled
appearances due to the unusual movements employed during
Capture
Calibration
scanning. Regardless, features are separated by the same (e.g.,
10µm) spacings.
5. Continue drawing lines and entering measured distances until all
Capture Calibration
images are measured. When the software is finished, it prompts the user that it is done.
If
Capture Calibration
and
Autocalibration
routines are completed correctly, the SPM is
calibrated within 1-2 percent accuracy over most of the scanner’s measuring range. Should it be
necessary to obtain better accuracy, the SPM can be
fi
ne-tuned to obtain maximum measuring
accuracy. This is accomplished through the use of calibration parameters discussed in the next
section.
Draw a vertical line
Autocalibration
041
