Calibration, Maintenance, Troubleshooting and Warranty
SPM Calibration Overview
Rev. B
MultiMode SPM Instruction Manual
279
Through rigorous quality control of its scanner piezos, Veeco has achieved excellent modeling of
scanner characteristics. Two calibration points are typically used for
fi
ne-tuning: 150 and 440V. (A
third point is assumed at 0 nm/V.) These three points yield a second-order sensitivity curve to
ensure accurate measurements throughout a broad range of scanner movements.
Because scanner sensitivities vary according to how much voltage is applied to them, the reference
must be thoroughly scanned at a variety of sizes and angles. The user then tells the software the
distance between known features on the reference’s surface, and a parameter is recorded to
compensate the scanner’s movements. The X, Y and Z axes may be calibrated in any sequential
order; however, the linearization adjustments (
Linearity Correction Procedure:
must be performed before any calibrations are attempted. Otherwise, calibrations will be undone by
linearity adjustments.
Time
Scanner
Movement
Scanner
Voltage
