Calibration, Maintenance, Troubleshooting and Warranty
Fine-tuning for X-Y Calibration
294
MultiMode SPM Instruction Manual
Rev. B
15.7
Fine-tuning for X-Y Calibration
Fine-tuning is usually performed at two
Scan size
settings:
150
and
440V
. Both horizontal and
vertical measurements of sample features are made, then compared with actual distances. Based
upon this comparison, computer parameters are
fi
ne tuned. To
fi
ne tune your SPM for maximum X-
Y measuring accuracy, review each of the steps below.
Note:
If you are using an “A” scanner to image atomic-scale features, substitute
graphite or mica for the silicon calibration reference. See
directions in atomic-scale calibration of the X- and Y-axes.
15.7.1
Prepare System for Fine-Tuning
1. Set the
Scan size
parameter on the
Scan Controls
panel to the maximum value (440V).
2. Verify that the
Scan angle
is set at
0.00
degrees.
3. Mount a calibration reference into the SPM and begin imaging. This may consist of a generic
(e.g., 10µm, silicon) reference, or a sample having features of known dimensions (e.g.,
grating, etc.).
4. Optimize the image quality.
Note:
Your calibration and
fi
ne-tuning procedures are no better than the procedures
and references used.
Choose both carefully!
15.7.2
Measure Horizontally at 440V Scan Size
1. Set the
Scan size
parameter on the
Scan Controls
panel to the maximum value (
440V
).
Verify that the
Scan angle
is set to
0.00
degrees.
Engage
the surface.
2. Select two widely-spaced features on the sample image of known separation. Use the mouse
to draw a horizontal line between them. (For example, on a 10µm silicon reference, draw the
line from the left side of one pit to the left side of another pit as far away as possible.) The
screen will display the measured distance between pits next to the line.
