Calibration, Maintenance, Troubleshooting and Warranty
Linearity Correction Procedure
Rev. B
MultiMode SPM Instruction Manual
285
Adjust Fast Mag0
1. After engaging, click on
Microscope
>
Calibrate
>
Scanner
to open the
Scanner
Calibration
window. As parameters values are changed, the effects will be seen on the
display monitor.
2. Move the mouse cursor to the display monitor and select
Zoom Out
to produce a box whose
size and position can be changed by alternate clicks on the left mouse button.
3. Adjust the box until it is about one-third the size of the scan.
4. Click
once
on the right mouse button to set the box, free the cursor, and move to
Execute
.
Note:
Clicking twice will execute a
Zoom
, which you do not want to do.
5. Select
Fast mag0,
the first scanner parameter to modify.
6. Move the zoom box to the start of the fast scan (on the left if the
Line direction
is set to
Trace
).
7. Move and size the zoom box until the beginning third of the scan's features are exactly
aligned with the zoom box.
Note:
The beginning third of the scan is the standard for judging almost all of the
linearity values. Ignore the set of features near the edges of the scan since these
may be distorted slightly.
8. Move the zoom box to the end third of the scan.
9. Align one side of the zoom box with desired features and observe how the other side aligns
with the features under it.
10. Compare the beginning third of the scan to the features in the end third of the scan. If the
features are too large to fit an equal number inside the zoom box, decrease the
Fast mag0
value. If the features are too small, increase the
Fast mag0
value. Change
Fast
mag0
by
about 0.1 to 0.3 units at a time.
11. The entire scan axis is affected each time a parameter changes, so after every change, resize
the zoom box at the beginning third of the scan and compare again with the end third.
Figure 15.4a
Fast Scan Linearization: Mag0
Mag0 Too Large
Mag0 Too Small
