Calibration, Maintenance, Troubleshooting and Warranty
Troubleshooting the Vertical Engagement Scanners
332
MultiMode SPM Instruction Manual
Rev. B
15.17
Troubleshooting the Vertical Engagement Scanners
15.17.1
Scanner is not properly calibrated
Verify that the scanner’s parameter
fi
le has been properly copied to each of the computer’s
\EQUIP
directories. Check the parameter
fi
le name; it should include a .SCN extension (e.g.,
XXXXJV.SCN). Try to reselect the scanner using the
Realtime
>
Microscope
>
Scanner
panel.
If the parameter
fi
le is correctly selected but measures inaccurately, it may be necessary to calibrate
the scanner. This calibration procedure is detailed in earlier sections of this chapter.
15.17.2
Sample will not move (Tip “Up/Down” switch doesn’t work)
If the vertical scanner is adjusted to its maximum tube height, the leadscrew may disengage from
the motor coupling on the MultiMode base. (This is a built-in feature to prevent motor burn-out.)
To reengage the leadscrew, remove the scanner from the support ring, then manually back the screw
out several turns. Replace the scanner on the support ring and reattempt motorized movement.
If the leadscrew becomes fouled with grit, rotation may become dif
fi
cult or impossible. To inspect,
remove the scanner from the support ring and turn the leadscrew manually while feeling for
resistance. If the leadscrew resists rotation, it will have to be backed out, cleaned with solvent and
lubricated. (DO NOT attempt to clean the leadscrew while in the scanner body; solvents will ruin
the scanner circuitry!) A leadscrew cleaning procedure is detailed in
Support Note 216
available
from Veeco.
Note:
If screw is frozen (i.e., cannot be rotated), DO NOT attempt to force it! Return
the scanner body and screw to Veeco for repair.
