Cantilever Preparation
Silicon Cantilever Substrates
58
MultiMode SPM Instruction Manual
Rev. B
3. It may be convenient to break several substrates from the wafer at one time. Extras may be
safely stored in a specially prepared closable container. At the bottom of the container, place
X4-grade, GEL-PAK™ adhesive strips. Place the substrates, tips facing up, on the adhesive
to permit easy removal of the substrates when needed. Cover the container when not in use.
Figure 4.1a
Silicon Cantilever Substrates in Wafer
4. Use the curved, sharp-pointed tweezers to remove the cantilever substrate from the wafer
container. Grasp the sides of the substrate, away from the lever and probe tip. It may be
helpful to tip the substrate to one side to help grasp it in the tweezers. Be very careful about
avoiding any contact with the probe lever, since it will immediately snap off. Silicon is very
brittle.
Press here
to break out
substrate
Substrate
Supporting
Arm
Cantilever
Substrate
Cantilever
