Contact AFM Mode
Suggested Initial Control Settings
Rev. B
MultiMode SPM Instruction Manual
93
Interleave Controls Panel
If it is not already present, open the
Interleave Controls
Panel by selecting
Panels
>
Interleave
.
Verify that the
Interleave mode
fi
eld is set to
Disabled
. (Do not attempt to set
Interleave mode
to
Enabled
at this point).
Figure 6.2d
Interleave Controls Panel Settings for Initial Setup (Contact Mode)
Channel 1, 2 and 3 Panel
On the
Channel 1
panel, set
Data type
to
Height
). Set
Data Scale
to a reasonable
value for the sample. (For example, for the 180nm step height calibration sample a reasonable Data
Scale setting would be 300nm initially).
Line direction
can be set to either
Trace
or
Retrace
.
Figure 6.2e
Channel 1 Panel for Initial Setup (Contact Mode)
On the
Channel 2 panel,
set
Data type
to
Off
to disable the secondary channel (select
Panels
>
Channels
>
Channel 2
to view the
Channel 2
Panel).
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