Calibration, Maintenance, Troubleshooting and Warranty
Calibration Setup
Rev. B
MultiMode SPM Instruction Manual
281
15.2
Calibration Setup
15.2.1
Check Scanner Parameter Values
If the system's original scanner parameters are deleted, copy the scanner parameters from the
software CD shipped with every system. Individually purchased scanners are shipped with a head/
scanner disk containing backup
fi
les, or a hard copy of the scanner parameters. In the event that
fi
les are not found, fax or call Veeco for scanner calibration records.
15.2.2
Align Calibration Reference
Load the silicon calibration reference into the SPM. The reference will need to be aligned with the
microscope scanner so that the tip scans parallel to the reference’s features with the
Scan angle
set
at
0
degrees.
Align the reference within approximately 2 degrees of perpendicularity to the scan axes.
Scan angle = 0°
