Calibration, Maintenance, Troubleshooting and Warranty
SPM Calibration Overview
Rev. B
MultiMode SPM Instruction Manual
277
Figure 15.1a
Scanner Crystal Voltage and Photodiode Voltage
The
Microscope
>
Calibrate
>
Scanner
function displays the
Scanner Calibration
dialog box,
allowing users to enter the sensitivity of their scanner’s X-Y axes. Here, sensitivity is measured in
terms of lateral displacement for a given voltage (nm/V).
In addition, the NanoScope software employs various derating and coupling parameters to model
scanners’ nonlinear characteristics. By precisely determining points along the scanner’s sensitivity
curve, then applying a rigorous mathematical model, full-range measuring capabilities can be
achieved with greater than 1% accuracy.
-220 VDC
0 VDC
+220 VDC
Laser
Photodiode
Scanner
Cantilever
-220
0
+220
Scanner Voltage
Photodiode V
oltage
-3.0
0
+3.0
Detector Sensitivity
array
Photodiode voltage
