Veeco 004-210-000, Instruction Manual

Page: 326 / 358

Calibration, Maintenance, Troubleshooting and Warranty
Calibration of “A” Scanners for Atomic-scale Measurement
306 MultiMode SPM Instruction Manual Rev. B
15.9 Calibration of “A” Scanners for Atomic-scale
Measurement
The “A” scanner is the smallest scanner, with a total travel of approximately 0.4µm along each axis.
Its compact design lends excellent stability for atomic scans, and requires slightly modi
fi ed X-Y
calibration procedures. These are treated in this section. The procedure for X-Y calibration
described below is essentially the same as those described in
Section 15.7.2 – Section 15.7.3 of this
manual; however, they substitute graphite or mica atoms for the pits seen on silicon calibration
references. A similar procedure is outlined in
Chapter 9 of this manual for STM imaging of
graphite. Please note that this procedure applies only to X-Y calibration of atomic-scale imaging.
The Z-axis is calibrated in the normal way using a silicon calibration reference as described in
Section 15.8 above.
15.9.1 Prepare Sample
Perform the calibration with either highly ordered pyrolytic graphite (HOPG) or mica. Mica should
be used for contact AFM; HOPG for STM. Cleave both mica and HOPG to obtain a good
fl at
surface. Cleave by adhering tape to the surface and pulling it off; this produces a fresh surface of
atoms having a regular lattice.
1. Place the sample on a puck, then attach to the scanner cap.
2. To obtain contact AFM atomic-scale images, try the following Realtime parameter settings:
Panel Parameter Setting
Scan Controls Scan Size 12nm
X offset 0.00nm
Y offset 0.00nm
Scan angle 0.00 deg
Scan rate 61.00Hz
Number of samples 256 or 512
Slow scan axis Enabled
Z limit 440V
Feedback Controls Integral gain 12.00
Proportional gain 4.00
LookAhead gain 0.00
Setpoint 0V
Other Controls AFM mode Contact
Input attenuation 1x
Interleave Controls Interleave mode Disabled
Channel 1 Data type Height
Highpass fi lter 3–4
Lowpass fi lter 1