Calibration, Maintenance, Troubleshooting and Warranty
Fine-tuning for X-Y Calibration
296
MultiMode SPM Instruction Manual
Rev. B
Figure 15.7b
Scanner Calibration Dialog Box
Multiply the quotient obtained in
X fast sens
value shown on the
Scanner
Calibration
panel. Enter the new value. This new value adjusts the scanner’s fast scan axis to more
closely match calculated distances with actual feature distances. The new sensitivity setting takes
effect as soon as it is entered. To save it to the computer’s hard disk, click on the
Ok
button.This
closes the
Scanner Calibration
panel.
15.7.3
Measure Vertically at 440V Scan Size
1. Return to the image of the calibration reference. Clear the horizontal line drawn in
(click the right mouse button, or click
Clear
). After waiting for at least three full scans
(to allow the piezo to stabilize), select two widely spaced features and draw a vertical line
connecting like portions of features (top edge-to-top edge, etc.). The SPM displays the
calculated distance between features.
2. Verify that the microscope’s calculated distance agrees with the known vertical distance. If
there is significant disagreement between the two, fine tuning is required; go to
. If the
displayed distance agrees with the known distance, skip to
3. Using the results in
, perform the following calculation:
019
Known distance between features
SPM-calculated distance between features
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