Calibration, Maintenance, Troubleshooting and Warranty
Fine-tuning for X-Y Calibration
Rev. B
MultiMode SPM Instruction Manual
297
Divide the known distance by the distance displayed next to the line drawn in
. Write this
value down.
4. Select the
Realtime
>
Microscope
>
Calibrate > Scanner
function to display the
Scanner
Calibration
dialog box.
5. Multiply the quotient obtained in
Y slow sens
value shown on the
Scanner
Calibration
panel, then enter the new value. This should adjust the scanner’s slow scan axis
to more closely match calculated distances with actual feature distances. To save the new
parameter value, click on the
Ok
button.
15.7.4
Measure Horizontally at 150V Scan Size
1. Verify that the
Scan angle
is set to
0.00
degrees, and that
Units
(
Other Controls
panel) is
set to
Volts
. Set the
Scan size
parameter on the
Scan Controls
panel to one-third the
maximum (
150V
). Select two widely-spaced features on the sample image of known
separation, then use the mouse to draw a horizontal line between them. (For example, on a
10-micron, silicon reference, draw the line from the left side of one pit to the left side of
another pit as far away as possible.) The microscope will display the measured distance next
to the line.
2. Check to see whether the microscope’s measured distance agrees with the known horizontal
distance. If there is significant disagreement between the two, fine tuning is required; go to
. If the displayed distance agrees with the known distance, skip to
3. Adjustments may be made in one of two ways. The first method uses trial and error to “dial
in” in the correct value. The second method calculates a precise correction.
Trial and Error Method
1. Select
Realtime
>
Microscope
>
Calibrate
>
Scanner
to display the
Scanner Calibration
dialog box.
2. Select the
X fast derate
parameter or
Y slow derate
for Y-axis adjustment.
3. If the measured distance is less than the actual distance, decrease the
X fast derate
parameter
slightly or
Y slow derate
for Y-axis adjustment and re-measure image features.
4. Adjust deratings up or down until measurements accord with known feature distances.
