54
The measurement output voltage can be converted to a pressure value using the following
equation.
P: Pressure value
（
Torr
）
V: Measured output voltage
（
V
）
E: V from which decimal point is rounded down
（
V
）
P=10(V-E)
×
10
-(6-E)
（
Torr
）
0
1
2
3
4
5
6
1.0E-08
1.0E-07
1.0E-06
1.0E-05
1.0E-04
1.0E-03
1.0E-02
O
u
tp
u
t V
ol
tage
(V
)
Pressure (Pa)
Summary of Contents for GI-M2
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