Ulvac GI-M2, Instruction Manual

Page: 73 / 101

67
11.4. Explanation of Command Action
11.4.1. Changing over remote/local control
Command Parameter Response Explanation of function
‘RE’
－
‘OK’ or ‘NG’ Sets remote status
‘LO’
－
‘OK’ or ‘NG’ Sets local status
Send ′ RE ′ command when the remote control is used in the remote (RS-232C) mode.
After recept ‘RE’, lit when in the LED of “REMOTE” on a front panel and send back ‘OK’.
When the remote control by the communication, a front panel and the input from IO are
invalid.
Send ‘LO’ when it finish the remote control by communications.
Use the following control commands after the ,`’RE ' sending.
11.4.2. Reading the connection model
Command Parameter Response Explanation of function
‘GS’
－
‘GI-
xx
’ Reads control status
Send back the model (the model name).
Send back ‘GI-M2’
、
‘GI-D7’
11.4.3. Control of filament
→
Refer to
Ｐ．
40
Command Parameter Response Explanation of function
‘FO’
－
‘OK’ or ‘NG’ Turns OFF filament
‘F1’
－
‘OK’ or ‘NG’ Turns ON filament
‘FA’
－
‘OK’ or ‘NG’ Selects filament-1
‘FB’
－
‘OK’ or ‘NG’ Selects filament-2
Turning ON/OFF the filament.
When it dose not appoint filament 1/2, it turns on a set filament last.
It is memorized, and the setting of filament 1/2 is reflected at the time of the front panel
operation by the main body.
By a `RS' command, the reading of the set point of the filament is possible.
11.4.4. Control of degassing
→
Refer to P.31
Command Paramete
r
Response Explanation of function
‘D0’
－
‘OK’ or ‘NG’ Turns OFF degassing
‘D1’
－
‘OK’ or ‘NG’ Turns ON degassing
‘DA’
－
‘OK’ or ‘NG’ Selects degassing AUTO mode use ON
‘DB’
－
‘OK’ or ‘NG’
Selects degassing AUTO mode use OFF
‘DS’ ‘
XX
’ ‘OK’ or ‘NG’ Sets degassing AUTO mode time in
′
XX
′
minutes
Degassing is active after the filament is ON.
Setting of AUTO
・
MODE time is
０１～９９
min. Send
‘
DS
XX
’ （
XX
:01-99
）
command.
When it dose not set, it uses the value that is finished with the setting of the main body.
It is memorized, and this setting is reflected at the time of the front panel operation by the
main body.