Ulvac GI-M2, Instruction Manual

Page: 61 / 101

55
9.6.8.GI-TL3 Compatibility output
（
GI-D7 Only
）
The table below gives the relationship between pressure and output voltage.
Table. 9-12
Measurement value outputs
Displayed pressure
value (Pa)
Output voltage
(V)
Displayed pressure
value (Pa)
Output voltage
(V)
6.00x10
-1
9.56 2.00x10
-3
4.60
4.00x10
-1
9.20 1.00x10
-3
4.00
2.00x10
-1
8.60 6.00x10
-4
3.56
1.00x10
-1
8.00 4.00x10
-4
3.20
6.00x10 -2 7.56 2.00x10 -4 2.60
4.00x10
-2
7.20 1.00x10
-4
2.00
2.00x10
-2
6.60 6.00x10
-5
1.56
1.00x10
-2
6.00 4.00x10
-5
1.20
6.00x10
-3
5.56 2.00x10
-5
0.60
4.00x10
-3
5.20 1.00x10
-5
0.00
Displayed pressure
value (Torr)
Output voltage
(V)
Displayed pressure
value (Torr)
Output voltage
(V)
6.00x10
- ３
9.56 2.00x10
- ５
4.60
4.00x10
- ３
9.20 1.00x10
- ５
4.00
2.00x10
- ３
8.60 6.00x10
- ６
3.56
1.00x10 - ３ 8.00 4.00x10 - ６ 3.20
6.00x10
- ４
7.56 2.00x10
- ６
2.60
4.00x10
- ４
7.20 1.00x10
- ６
2.00
2.00x10
- ４
6.60 6.00x10
- ７
1.56
1.00x10
- ４
6.00 4.00x10
- ７
1.20
6.00x10
- ５
5.56 2.00x10
- ７
0.60
4.00x10
- ５
5.20 1.00x10
- ７
0.00
P: Pressure value
（
Pa
）
V: Measured output voltage
（
V
）
P=10
(V/2-5)
（Ｐａ）