Ulvac GI-M2, Instruction Manual

Page: 12 / 101

6
2.SPECIFICATIONS AND COMPONENTS
2.1.Standard Specifications
Name
Model GI-M2 metal
ionization vacuum gauge
Model GI-D7 ionization
vacuum gauge
Model GI-N8 ionization
vacuum gauge
Compatible
sensor head
1 pc
Pressure display
Mantissa part 3 digits, exponent part 2 digits digital display
□
.
□□
× 10
□□
※１）
Compatible
sensor head
M-11,M-12,M-13,M-14,
M-15
WIT-G type, WIB-G type,
WIB-N3
WIN-Gtype, WIN-N2,
WIN-N3
Measurement
pressure range
5.00
×
10
－
8
－
9.99
×
10
0
(Pa)
3.00
×
10
－
10
－
7.40
×
10
-2
(Torr)
WIT
：
1.30
×
10
－
5
－
6.70
×
10
－ 1
(Pa)
1.00
×
10
－
7
－
5.00
×
10
－ 3
(Torr)
WIB
：
1.30
×
10
－
6
－
1.30
×
10
－
2
(Pa)
1.00
×
10
－
8
－
1.00
×
10
－
4
(Torr)
4.00
×
10
－
9
－
6.60
×
10
－
1
(Pa)
3.00
×
10
－
11
－
5.00
×
10
－
3
(Torr)
Measurement
accuracy
Within
±１５％
Operating
potential
Grid potential: 150(V), Filament potential: 25(V), Collector potential:0(V)
Emission current
10
μＡ，
1.0
ｍＡ
※２）
WIT
：
0.595mA
WIB
：
1.0mA
0.5
ｍ
A
，
5.0mA
※３）
Sensor head
sensitivity
0.06 Pa
－１
WIT
：
0.139 Pa
－１
WIB
：
0.083 Pa
－１
0.153 Pa
－１
Pressure
protecting
function
9.99
×
10
－
0
Pa
※４）
7.40
×
10
－
2
Torr
ＷＩＴ：
9.99
×
10
－
1
Pa
9.99
×
10
－
3
Torr
ＷＩＢ：
2.00
×
10
－
1
Pa
2.00
×
10
－
3
Torr
6.60
×
10
－
1
Pa
6.60
×
10
－
3
Torr
Degassing
function
Direct electrical heating
of grid
ＡＣ Ｐｏｗｅｒ １．５ＶＡ
Direct electrical heating
of grid
ＡＣ Ｐｏｗｅｒ １．５ＶＡ
Electron bombardment
system.
※５）
500V
、
5mA
Normal mode
：
Operates according to DEGAS ON/OFF signal.
Auto OFF mode
：
When this mode is set, degassing is automatically turned off
after a preset time by setting an arbitrary time of 01 to 99 minutes
Function
Settiong of range hold
、
Selection of filament
、
Setting of sensitivity
Sampling time
１００ｍｓ
ec
Analog output
Each digit mantissa part linear output,
All measurement ranges pseudo-log. Output,
Designated range hold linear output, LOG Output
Resolution : 10mV
Output impedance : Approx. 100 ohms
Setpoint
Two points can be set independently.
Relay contact output (COM, a contact, b contact for each setting).
Contact capacity
ＡＣ：１２５
V
ＭＡＸ
，
0.5A
ＭＡＸ
／ ＤＣ：
24V
ＭＡＸ
，
1.0A
ＭＡＸ
Control input
signal
Control changeover, Filament ON/OFF, Filament 2/1, Degas ON/OFF, Range hold,
External protecting
Control output
signal
Analog output (0-10V), BDC output, Power condition, Filament ON/OFF, Emission
setting, Degas ON/OFF, Emission valid OK/NG
RS-232C
9600
／
19200
／
38400 bps
Operating
temperature
range
１０ ～ ４０ ℃
Operating
humidity range
１５ ～
80
％ （
No condensation
）