Ulvac GI-M2, Instruction Manual

Page: 30 / 101

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7.4. X-Ray Function ON/OFF (GI-N8 Only)
→
Refer to P.57
ＵＮＤＲ－①
Holding down the F1 key for two seconds
turns on the X-Ray action. A second
press on the key (for two seconds or more)
turns off the X-Ray action.
The lamp above the F1 key lights
when the X-Ray action is actuated.
Available under a pressure of 3.0
×
10
-
8
Pa (2.0
×
10
-10
Torr) or less.
7.5. When Pressure Protection Is Activated
ＰＲＴ－①
If pressure protection is activated by
pressure rise during measurement and
the filament is turned off, [
Ｅｒｒ． １３
]
will light on the segment indicator.
0 volt is outputted as measurement value.
To make measurement again, press the
ENT key to set up the (MESU-
① statu s)
and check pressure by a Pirani gauge or
other and turn on the filament again.
Refer to STANDARD SPECIFICATION
(P.6) for more imformation.
7.6. When EXT-PROTECT Is Activated
ＰＲＴ－②
If the EXT-PROTECT signal of external input
signal pin 18 is given, the LED marked with
○
in the left figure will light and [
Ｐｒｏ ｔ
]
will light on the segment indicator.
0 volt is outputted as measurement value.
To make measurement again, reset the
external input signal to set up the MESU-
①
status.
7.7.Display when an error occurs
No Content
Err.11 Filament broken
Err.12 The setting value exceeds the setting range
Err.13 Pressure protect
Err.14 Filament broken during DEGAS
Pa