Ulvac GI-M2, Instruction Manual

Page: 65 / 101

59
10. EXTERNAL INPUTS/OUTPUTS
Signals are exchanged with outside through the EXT-I/O connector on the rear panel,
except through RS-232C.
Table. 10-1 A list of EXT-I/O functions
Termi
nal
No.
Signal identification
Terminal
direction
Signal contents
１
ＳＥＴ１ ＣＯＭ
Out
Relay output
（ AC125V/0.5A 、 DC24V/1A max ）
２
ＳＥＴ１ ａ contact
３
ＳＥＴ１ ｂ contact
４
５
ＥＸＴ－ＯＵＴ ＣＯＭ Out External digital output GND
６
POWER
＿＿
E
ON
E A
／ OFF Out
Reading of ON/OFF of the main power
supply
７
FILAMENT
A
＿＿
E
ON
E A
／ OFF Out State reading of the filament
８
EMISSION
A
＿＿＿
E
Em-Hi
E A
／ Em-Lo Out The setting reading of the emission current
９
UNIT
A
＿＿
E
Pa
E
Out The setting reading of the pressure unit
１０
DEGAS
A
＿＿
E
ON
E A
／ OFF Out State reading of the DEGAS movement
１１
EMISSION ･ VALID
A
＿＿
E
OK
E A
／ NG Out Validity of emission current
１２
DATA
･
VALID
A
＿＿
E
Lo
E A
／
Hi
Out It works during output data update
１３
PRESSURE ･ DATA
A
＿
E
－
EA
／ ＋
Out The pressure value output （ BCD outut ）
１４
PRESSURE ･ DATA
A
＿＿＿＿
E
Ｃ－ b3
E
１５
PRESSURE ･ DATA
A
＿＿＿＿
E
Ｄ－ b0
E
１６
１７
DEGAS
A
＿＿
E
ON
E A
／ OFF In A control input of the DEGAS movement
１８
EXT-PROTECT
A
＿＿
E
ON
E A
／ OFF In Eternal protect input （ Forced filament OFF ）
１９
EXT- 5V INPUT-COM
In Power supply input for eternal control inputs
２０
EXT-24V INPUT-COM
２１
２２
２３
ＧＮＤ Eternal control input GND （ D-GND ）
２４
ＧＮＤ （ＲＥＣ－ＯＵＴ － ） Analog output GND （ A-GND ）
２５
ＲＥＣ－ＯＵＴ ＋ Out The pressure value output （ analog output ）
２６
ＳＥＴ２ ＣＯＭ
Out
Relay output
（ AC125V/0.5A 、 DC24V/1A max ）
２７
ＳＥＴ２ ａ接点
２８
ＳＥＴ２ ｂ接点
２９
３０
PRESSURE ･ DATA
A
＿＿＿＿
E
Ａ－ b0
E
Out Pressure output （ BCD output ）
３１
PRESSURE ･ DATA
A
＿＿＿＿
E
Ａ－ b1
E
３２
PRESSURE ･ DATA
A
＿＿＿＿
E
Ａ－ b2
E
３３
PRESSURE ･ DATA
A
＿＿＿＿
E
Ａ－ b3
E
３４
PRESSURE ･ DATA
A
＿＿＿＿
E
Ｂ－ b0
E
３５
PRESSURE ･ DATA
A
＿＿＿＿
E
Ｂ－ b1
E
３６
PRESSURE ･ DATA
A
＿＿＿＿
E
Ｂ－ b2
E
３７
PRESSURE ･ DATA
A
＿＿＿＿
E
Ｂ－ b3
E
３８
PRESSURE ･ DATA
A
＿＿＿＿
E
Ｃ－ b0
E
３９
PRESSURE ･ DATA
A
＿＿＿＿
E
Ｃ－ b1
E
４０
PRESSURE ･ DATA
A
＿＿＿＿
E
Ｃ－ b2
E