Ulvac GI-M2, Instruction Manual

Page: 51 / 101

45
GI-
Ｄ７ Pseudo-
LOG OUTPUT
Table. 9-5
Measured Pressure Value Table (GI-D7)
Displayed pressure
value (Pa)
Output voltage
(V)
Displayed pressure
value (Pa)
Output voltage
(V)
6.70x10
-1
6.67 5.00x10
-4
3.50
1.00x10
-1
6.10 1.00x10
-4
3.10
5.00x10
-2
5.50 5.00x10
-4
2.50
1.00x10
-2
5.10 1.00x10
-5
2.10
5.00x10
-3
4.50 5.00x10
-6
1.50
1.00x10
-3
4.10 1.30x10
-6
1.13
Displayed pressure
value (Torr)
Output voltage
(V)
Displayed pressure
value (Torr)
Output voltage
(V)
9.99x10
-3
6.99 1.00x10
-6
3.10
1.00x10
-3
6.10 5.00x10
-7
2.50
5.00x10
-4
5.50 1.00x10
-7
2.10
1.00x10
-4
5.10 5.00x10
-8
1.50
5.00x10
-5
4.50 1.00x10
-8
1.10
1.00x10
-5
4.10 5.00x10
-9
0.50
5.00x10
-6
3.50 1.30x10
-9
0.13
Table. 9-6
Hysteresis by the pressure that increased and decreased
Increae Decrease
Displayed pressure
value (Pa)
Output voltage
(V)
Displayed pressure
value (Pa)
Output voltage
(V)
1.00
×
10
-1 6.10
1.00
×
10
-1 6.10
0.90
×
10
-1
6.09
9.00
×
10
-2
5.90
0.80
×
10
-1 6.80
8.00
×
10
-2 5.80
The measurement output voltage can be converted to a pressure value using the following
equation.
P: Pressure value
（
Pa
）
V: Measured output voltage
（
V
）
E: V from which decimal point is rounded down
（
V
）
GI-D7:
P=10(V-E)
×
10
-(
７
-E)
（
Pa
）