Ulvac GI-M2, Instruction Manual

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11.3. List of Commands
Comm
and
Parameter Response
Explanation of function
‘RE’
－
‘OK’ or ‘NG’ Sets remote status
‘LO’
－
‘OK’ or ‘NG’ Sets local status
‘GS’
－
‘GI-
ｘｘ
’
Reads control status
‘FO’
－
‘OK’ or ‘NG’
Turns OFF filament
‘F1’
－
‘OK’ or ‘NG’
Turns ON filament
‘FA’
－
‘OK’ or ‘NG’
Selects filament - 1
‘FB’
－
‘OK’ or ‘NG’ Selects filament - 2
‘D0’
－
‘OK’ or ‘NG’
Turns OFF degassing
‘D1’
－
‘OK’ or ‘NG’
Turns ON degassing
‘DA’
－
‘OK’ or ‘NG’ Selects degassing AUTO mode use ON
‘DB’
－
‘OK’ or ‘NG’
Selects degassing AUTO mode use OFF
‘DS’ ‘
XX’
‘OK’ or ‘NG’
Sets degassing AUTO mode time in
′
XX
′
minutes
'
ＥＭ
'
－
'
ＯＫ
' or '
ＮＧ
' Reads emission valid status
'
ＥＳ
'
－
'
０５
' or '
５０
' Reads emission status (GI-N8)
'
Ｅ０
'
－
'
ＯＫ
' or '
ＮＧ
' Selects emission current 0.5mA (GI-N8)
'
Ｅ１
'
－
'
ＯＫ
' or '
ＮＧ
' Selects emission current 0.5mA (GI-N8)
‘SA’
－
‘OK’ or ‘NG’
Sets sensitivity factor (N
2
)
‘SB’
－
‘OK’ or ‘NG’
Sets sensitivity factor (Ar)
‘SE’ ‘X.XXE
±
XX’’
‘OK’ or ‘NG’ Sets sensitivity factor
‘R1’
－
‘
X.XXE-XX’’ Reads data of setpoint-1
‘R2’
－
‘
X.XXE-XX’’ Reads data of setpoint-2
‘S1’ ‘
X.XXE-XX’’
‘OK’ or ‘NG’
Sets setpoint-1
‘S2’ ‘
X.XXE-XX’’
‘OK’ or ‘NG’
Sets setpoint-2
‘SP’
－
‘1-
X/2-X Reads setpoint-1 and -2 status
‘LI’
－
‘OK’ or ‘NG’ Selects analog
″
LIN
″
‘LG’
－
‘OK’ or ‘NG’
Selects analog
″
Pseudo-LOG
″
‘LH’
－
‘OK’ or ‘NG’
Selects analog
″
REC-HOLD
″
‘L4’
－
‘OK’ or ‘NG’ Selects Analog “LOG output” (GI-M2)
‘L6’
－
‘OK’ or ‘NG’ Selects Analog “GI-D6 compatibility output” (GI-D7)
‘L3’
－
‘OK’ or ‘NG’ Selects Analog “GI-TL3 compatibility output” (GI-D7)
‘LS’ ‘E-
XX’
‘OK’ or ‘NG’
Sets range hold linear output value (range)
‘RP’
－
‘X.XXE-XX’
Reads measured pressure data
‘PR’
－
‘ON’ or ‘OF’
Reads EXT-PROTECT status
‘RS’ ‘ XXXXXXX’ Reads action status