Ulvac GI-M2, Instruction Manual

Page: 74 / 101

68
11.4.5. Reading the emission valid signal
Command Parameter Response Explanation of function
'
ＥＭ
'
－
'
ＯＫ
' or '
ＮＧ
' Reads emission valid status
'
ＥＳ
'
－
'
０５
' or '
５０
' Reads emission status (GI-N8)
'
Ｅ０
'
－
'
ＯＫ
' or '
ＮＧ
' Selects emission current 0.5mA (GI-N8)
'
Ｅ１
'
－
'
ＯＫ
' or '
ＮＧ
' Selects emission current 0.5mA(GI-N8)
Send back the emission valid. Send back '
ＮＧ
' when the filament OFF.
GI-N8 can read about setting and conditons of emission current and at the time, it points
at
“
05
”
:0.5mA
、“
50
”：
5mA.
11.4.6. Setting the sensitivity
→
Refer to
Ｐ．
35
Command Parameter Response Explanation of function
‘SA’
－
‘OK’ or ‘NG’ Sets sensitivity factor (N
2
)
‘SB’
－
‘OK’ or ‘NG’ Sets sensitivity factor (A
ｒ
)
‘SE’ ‘
X.XX
E
±
XX
’ ‘OK’ or ‘NG’ Sets sensitivity factor
GI-M2 GI-D7 GI-N8
‘SA’
N2 N2 N2
‘SB’
Ar Ar H2
‘SE’ ‘X.XXE
±
XX’ ‘X.XXE
±
XX’ ‘X.XXE
±
XX’
It is memorized, setting of value
‘
SE X.XXE
±
XX ’ by the main body.
It is reflected at the time of the front panel / IO operation.
11.4.7. Setting and reading the set point
→
Refer to
Ｐ．
37
Command Parameter Response Explanation of function
‘R1’
－
‘
X.XXE-XX
’ Reads data of set point-1
‘R2’
－
‘ X.XXE-XX ’ Reads data of set point-2
‘S1’ ‘
X.XXE-XX
’ ‘OK’ or ‘NG’ Sets set point-1
‘S2’ ‘
X.XXE-XX
’ ‘OK’ or ‘NG’ Sets set point-2
‘SP’
－
‘1- X /2- X ’ Read the status of setpoint-1 and -2
Reading of setting and setting value of the set point.
It is reflected at the time of the front panel / IO operation.
The state of the set point is ON
：
1, OFF
： ０
is set by X of reply data `1-X/2-X'.
11.4.8. Setting analog output
→
Refer to
Ｐ．
41
Command Parameter Response Explanation of function
‘LI’
－
‘OK’ or ‘NG’ Selects analog “LIN”
‘LG’
－
‘OK’ or ‘NG’ Selects analog “Pseudo-LOG”
‘LH’
－
‘OK’ or ‘NG’ Selects analog “REC-HOLD”
‘L4’
－
‘OK’ or ‘NG’ Selects analog “LOG” (GI-M2)
‘L6’
－
‘OK’ or ‘NG’ Selects analog “GI-D6” compatibility output” (GI-
D7)
‘L3’
－
‘OK’ or ‘NG’ Selects analog “GI-TL3” compatibility output”
(GI-D7)
‘LS’ ‘E-
XX
’ ‘OK’ or ‘NG’ Selects range hold linear output (range)
Set an analog output method.
The set point of the `LS' command sets the range which is ,` E-XX '.
It is reflected at the time of the front panel / IO operation.