Ulvac GI-M2, Instruction Manual

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14
4.
3B
INSTALLATION
4.1.
26B
Preliminary Operation
①
Unpack the gauge and check quantities. (See page 7 for the accessories.)
②
Check components to see if they are damaged.
4.2.
27B
Installing the controller
• Install the controller on a panel or other.
See page 85 for the mounting hole.
4.3.
28B
Installing the sensor head
Install the sensor head to the gauge port or
flange of a vacuum system.
4.3.1.
77B
Measuring position
The gauge measures the static pressure in the
position where the sensor head is connected. If there is a flow, source of outgas, or an
intense source of electrons or ions in the vacuum system, the measurement value will be
affected by them. Select the measuring position carefully and install the gauge in a
position where measurement is least affected by them.
Notice that if the sensor head is subjected to vibration, heat radiation, intense
electromagnetic field or intense radiation, correct pressure measurement may not be
made.
4.3.2.
78B
Installing the sensor head
・
Install the sensor hrad in such a way that the sensor head mounting opening is
parallel with the flow of gas. See to it that wspecially gas dose not enter the
sensor head in the form of beam. (See Fig. 4-1)
・
Mont the filament so that it is perpendicular to garallel with the amplitude
direction of vibration if vibration is at a high level.
・
O-rings used for installing the sensor head should be as free of outgas as
possible. Use of a meteral that releases much outgas for connection of the sensor
head, such as rubber pipw or grease, ban be a cause of error.
・
If the filament is fubjected to a strong impact or vivration sideways when it is
slacked by teat, it may break or contact with the grid electrode.
Fig. 4-1 Installation of sensor head
Turn off
power.
Beware of high
temperature.
Ensure
ventilation.
Keep out foreign
matter.
Be cautious with
operating
environment.
Check connection.
WARNING
CAUTION
Perpendicular direction
Perpendicular direction
O-ring gland
Cap
Gauge port
Gas flowing direction