Ulvac GI-M2, Instruction Manual

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Contents
Fig. 3-1 Operation switch panel ...................................................................................................... 8
Fig. 3-2 Front panel lamps .............................................................................................................. 9
Fig. 3-3 Front panel measurement value display/set value indicator .......................................10
Fig. 3-4 Rear panel .........................................................................................................................11
Fig. 3-5 Input/output connector pin assignment .........................................................................12
Fig. 3-6 View when bottom panel in controller is opened ...........................................................13
Fig. 4-1 Installation of sensor head ..............................................................................................14
Fig. 4-2 Reference drawing for mounting nude gauge to short tube ..........................................15
Fig. 4-3 Connection of controller (GI-M2) and sensor head ........................................................16
Fig. 4-4 Conection of sensor head cable and GI-D7/N8 ...............................................................16
Fig. 4-5 WIT connection .................................................................................................................17
Fig. 4-6 WIB(WIT) Connection......................................................................................................17
Fig. 4-7 WIN-G Connection ...........................................................................................................18
Fig. 4-8 WIB-N3
、
WIN-N Connection ...........................................................................................18
Fig. 9-1 Analog output graph (Linear) .........................................................................................42
Fig. 9-2 Supplementary explanation of output voltage (GI-M2) ................................................44
Fig. 9-3 Supplementary explanation of output voltage (GI-D7) .................................................46
Fig. 9-4 Supplementary explanation of output voltage (GI-N8) .................................................47
Fig. 9-5 REC-HOLD output (REC-HOLD with E-4) ...................................................................48
Fig. 9-6 LOG output .......................................................................................................................50
Fig. 9-7 GI-D6 Compatibility output (WIT) .................................................................................52
Fig. 9-8 GI-D6 Compatibility output (WIB) .................................................................................53
Fig. 9-9 LOG output .......................................................................................................................56
Fig. 10-1 Set point internal circuit ...............................................................................................61
Fig. 10-2 Digital output internal circuit .......................................................................................61
Fig. 10-3 Data valid signal (strobe signal) actuating chart ........................................................62
Fig. 10-4 External control using internal power supply .............................................................63
Fig. 10-5 External control using external power supply .............................................................63
Fig. 10-6 Method of External Control ...........................................................................................64
Fig. 17-1 Dimensional drawing
・
panel cut drawing ....................................................................85
Fig. 17-2 Sensor heas GI-M2 .........................................................................................................86
Fig. 17-3 Sensor head electrode and pin assignment ..................................................................86
Fig. 17-4 Sensor head GI-D7 .........................................................................................................87
Fig. 17-5 Sensor head GI-N8 .........................................................................................................88
Fig. 17-6 Sensor head cable connection diagram (GI-M2) ..........................................................89
Fig. 17-7 Sensor head cable mouting reference drawing ............................................................89
Fig. 17-8 Long cable (GI-M2).........................................................................................................90
Fig. 17-9 Sensor head cable connection diagram GI-D7 WIT socket ) .......................................92
Fig. 17-10 Sensor head cable connection diagram(GI-D7 WIB socket type) .............................92
Fig. 17-11 Sensor head cable connection diagram (GI-D7 WIB-N3 socket type) ......................93
Fig. 17-12 Sensor head cable connection diagram (GI-N8 WIN socket type) ............................93
Fig. 17-13 Sensor head cable connection diagram (GI-D7 Pin socket type) ..............................94
Fig. 17-14 Sensor head cable connection diagram (GI-N8 Pin socket type) ..............................94
Fig. 17-15 Long cabel (GI-D7/GI-N8) ............................................................................................95
Table. 8-1 Factory Set Values .......................................................................................................26
Table. 9-1 Sensitivity Factor Reference .......................................................................................36
Table. 9-2 Measurement Value Output Status ............................................................................41
Table. 9-3 Measured Pressure Value Table (GI-M2) ...................................................................43
Table. 9-4 Hysteresis by the pressure that increased and decreased ........................................43
Table. 9-5 Measured Pressure Value Table (GI-D7) ...................................................................45
Table. 9-6 Hysteresis by the pressure that increased and decreased ........................................45
Table. 9-7 Measured Pressure Value Table (GI-N8) ...................................................................47
Table. 9-8 Hysteresis by the pressure that increased and decreased ........................................47