Ulvac GI-M2, Instruction Manual

Page: 8 / 101

2
(REC-HOLD) ....................................... 48
9.6.6. Logarithmic Output (GI-M2) 49
9.6.7. GI-D6 Compatibility output
（
GI-D7 Only
）
...................................... 51
9.6.8. GI-TL3 Compatibility output
（
GI-D7 Only
）
...................................... 55
9.7. X-R
AY
F
UNCTION
（
GI-N8 O
NLY
）
57
9.7.1. What is X-Ray mode setting? 57
9.7.2. How to actuate X-Ray
function 57
9.8. F
ILAMENT
A
CTIVATION
（
GI-N8
O
NLY
）
.................................................... 58
9.8.1. Actuating conditions ............. 58
9.8.2. Operation .............................. 58
9.8.3. What is filament activation? 58
10. EXTERNAL INPUTS/OUTPUTS .... 59
10.1. S
ET
P
OINT
O
UTPUT
.................... 61
10.2. E
XTERNAL
D
IGITAL
O
UTPUT
...... 61
10.3. E
XTERNAL
C
ONTROL
I
NPUT
....... 63
10.4. M
ETHOD OF
E
XTERNAL
C
ONTROL
................................................. 64
10.5. E
XTERNAL
P
ROTECT
I
NPUT
(EXT-
PROTECT) .............................................. 64
11. HOW TO USE COMMUNICATION
(RS-232C) ................................................ 65
11.1. C
OMMUNICATION
S
PECIFICATIONS
....................................... 65
11.1.1. Key specifications ................. 65
11.1.2. Baud rate setting .................. 65
11.1.3. Communication
cable/connector .................................... 65
11.2. S
END
C
OMMAND
F
ORMAT
.......... 65
11.3. L
IST OF
C
OMMANDS
................... 66
11.4. E
XPLANATION OF
C
OMMAND
A
CTION
67
11.4.1. Changing over remote/local
control 67
11.4.2. Reading the connection
model 67
11.4.3. Control of filament................ 67
11.4.4. Control of degassing ............. 67
11.4.5. Reading the emission valid
signal 68
11.4.6. Setting the sensitivity .......... 68
11.4.7. Setting and reading the set
point 68
11.4.8. Setting analog output ........... 68
11.4.9. Reading the measured
pressure value and action status ........ 69
11.5. C
AUTIONS IN
O
PERATION
........... 69
12. TROUBLESHOOTING .................. 70
12.1. C
AUSES OF
N
O
E
MISSION
C
URRENT AND
C
ORRECTIVE
A
CTIONS
....... 78
13. APPENDIX ................................... 79
13.1. P
RINCIPLES OF
O
PERATION
........ 79
13.2. T
YPE OF
M
EASURABLE
G
AS AND
S
PECIFIC
S
ENSITIVITY
F
ACTOR
................. 80
14. WARRANTY ................................. 82
15. CERTIFICATE OF
CONTAMINATION ................................. 83
16. CHINA ROHS DECLARATION ..... 84
17. RELATED DRAWINGS ................. 85
17.1. I
ON GAUGE
................................. 85
17.2. S
ENSOR HEAD
............................ 86
17.2.1. Sensor head GI-M2 ............... 86
17.2.2. Sensor head GI-D7 ............... 87
17.2.3. Sensor head GI-N8 ............... 88
17.3. S
ENSOR HEAD CABLE
（
GI-M2
）
89
17.3.1. Sensor head cable (GI-M2)
2,5,10,15m ........................................... 89
17.3.2. Sensor head cable (GI-M2) long
cable side ............................................. 90
17.3.3. Reference diagram of sensor
cable installation ................................. 91
17.4. S
ENSOR HEAD CABLE
（
GI-D7/GI-
N8
）
92
17.4.1. WIT socket type (GI-D7)
4,10,15,20,25
ｍ
.................................... 92
17.4.2. WIB socket type (GI-D7)
4,10,15,20,25
ｍ
.................................... 92
17.4.3. WIB-N3 socket type (GI-D7)
4,10,15,20,25
ｍ
.................................... 93
17.4.4. WIN-N2 socket type (GI-N8)
4,10
ｍ
93
17.4.5. WIN-N3 socket type (GI-N8)
4,10
ｍ
93
17.4.6. WIB Pin socket type (GI-D7)
4,10,15,20,25
ｍ
.................................... 94
17.4.7. WIN-G Pin socket type (GI-N8)
4,10
ｍ
94
17.4.8. Sensor head cable
（
GI-D7/GI-
N8
）
Long cable ................................... 95