Ulvac GI-M2, Instruction Manual

Page: 57 / 101

51
9.6.7.GI-D6 Compatibility output
（
GI-D7 Only
）
The table below gives the relationship between pressure and output voltage.
When chose WIT
Table. 9-10
Measurement value outputs
Displayed pressure
value (Pa)
Output voltage
(V)
Displayed pressure
value (Pa)
Output voltage
(V)
9.99x10
-1
4.99 1.00x10
-4
1.10
1.00x10
-1
4.10 5.00x10
-5
0.50
5.00x10
-2
3.50 1.30x10
-5
0.13
1.00x10
-2
3.10
5.00x10
-3
2.50
1.00x10
-3
2.10
5.00x10
-4
1.50
Displayed pressure
value (Torr)
Output voltage
(V)
Displayed pressure
value (Torr)
Output voltage
(V)
9.99x10
-3
4.99 1.00x10
-6
1.10
1.00x10
-3
4.10 5.00x10
-7
0.50
5.00x10
-4
3.50 1.30x10
-7
0.13
1.00x10
-4
3.10
5.00x10
-5
2.50
1.00x10
-5
2.10
5.00x10
-6
1.50
The measurement output voltage can be converted to a pressure value using the following
equation.
P: Pressure value
（
Pa
）
V: Measured output voltage
（
V
）
E: V from which decimal point is rounded down
（
V
）
P=10(V-E)
×
10
-(5-E)
（Ｐａ）