2
Functional Description
Mass Spectrometer
Thermo Scientific
TSQ Quantum XLS and TSQ Quantum GC User Guide
41
Vacuum System and Inlet Gasses Hardware
The vacuum system evacuates the region around the ion source, ion optics, mass analyzer, and
ion detection system. The principal components of the vacuum system include the following:
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•
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The inlet gasses hardware controls the flow of collision gas, CI reagent gas, calibration
compound, and air (during venting) into the mass spectrometer. The inlet gasses hardware
includes the following components:
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Collision Gas Flow Control Valves
•
Calibration Compound and CI Reagent Gas Flow Control
shows a functional block diagram of the vacuum system and inlet gasses hardware.
Figure 25.
Functional block diagram of the vacuum system and inlet gasses hardware
Collision
cell
Collision gas
divert valve
Collision
gas valve
Argon
gas port
Convectron
gauge
Exhaust
Forepump
Convectron
gauge
Ion
gauge
Transfer line
Gas
chromatograph
CI reagent
gas valve
CI reagent
gas port
Calibration
compound
valve
Calibration
compound
vial
Inlet
valve
Ion
gauge
Dual-inlet
turbomolecular pump
Analyzer
chamber
Ion source
chamber
Q0 quadrupole
chamber
Vent
valve
Air
filter
(3 x 10 - 6 Torr)
(4 x 10 - 5 Torr)