2
Functional Description
Mass Spectrometer
42
TSQ Quantum XLS and TSQ Quantum GC User Guide
Thermo Scientific
Vacuum Manifold
The vacuum manifold encloses the ion source, ion optics, mass analyzer, and ion detection
system assemblies. The vacuum manifold is a thick-walled, aluminum chamber with two
removable side cover plates, with openings on the front, sides, and top, and various electrical
feedthroughs and gas inlets.
The main vacuum manifold is divided into two chambers by a baffle. See
. The high
vacuum port of the turbomolecular pump evacuates the region inside the first chamber, called
the analyzer region, to less than 10
-5
Torr. The turbomolecular pump then discharges into the
forepump through the foreline.
The region inside the second chamber, called the Q0 quadrupole region, is evacuated to
1 mTorr by the interstage port of the turbomolecular vacuum pump.
A second vacuum manifold houses the ion source, which is open to the Q0 quadrupole
chamber. The interstage port of the turbomolecular pump evacuates the ion source region.