6 | Operation
INFICON
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UL6000-Fab-Operating-instructions-iina75en1-04-(2109)
3
Adjust the leak rate of the calibration leak used, see also “Set external
4
Place the device in the state "Standby" or "Measure".
5
Press the cross-hair icon
.
6
Select the calibration “External”.
7
Press
.
8
Follow the instructions on the screen.
6.3.16.3 Check calibration
The calibration can also be checked without changing calibration factor. This tells you
whether a new calibration is necessary.
ü
User rights
ü
The device is in "Standby" or "Measure" mode.
1
Select the cross-hair icon
.
2
Select “Proof“.
ð
The check is started and the calibration factor is recalculated.
ð
The newly calculated calibration factor is displayed.
ð
If the newly calculated calibration factor deviates considerably from the stored
calibration factor, a prompt for new calibration is displayed.
6.3.16.4 Measure internal calibration leak
ü
User rights
ü
The device is in "Standby" or "Measure" mode.
1
Select the cross-hair icon
.
2
Select "Measure internal calibration leak".
3
Press
.
ð
The calibration leak is opened, the measured leak rate is displayed and
compared with the target value.
Matching of the measured value of the internal calibration leak and the default value of
the internal calibration leak does not mean that the measuring system is absolutely
accurate if the internal calibration leak was used for calibrating the leak detector. See
also "Setting the machine factor [
67]".
Summary of Contents for 550-520
Page 2: ...INFICON GmbH Bonner Strasse 498 50968 Cologne Germany ...
Page 119: ...INFICON Decommissioning 9 UL6000 Fab Operating instructions iina75en1 04 2109 119 146 ...
Page 140: ...11 Appendix INFICON 140 146 UL6000 Fab Operating instructions iina75en1 04 2109 11 3 RoHS ...
Page 144: ...Index INFICON 144 146 UL6000 Fab Operating instructions iina75en1 04 2109 ...
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