Inficon 550-520, Translation Of The Original Operating Instructions

Page: 73 / 146

INFICON Operation | 6
UL6000-Fab-Operating-instructions-iina75en1-04-(2109) 73 / 146
After activating "Background suppression" the internal background and selectably also
the background in the inlet area is deducted from the leak rate. This happens after
pressing the START button automatically.
ü
Supervisor rights
1
> Setup > Measurement > ZERO and filter
2
Make your selection in the field “Background suppression“ between “Internal
only”, “Inlet area” and “Switched off“.
ð
Internal only
Factory setting. With every measurement the internal measurement signal
component of the device is deducted by pressing the START button. The
accuracy of the measurement results are no longer impaired by the internal
background.
At the time of pressing the button START:
In order to determine a new internal background, the leak detector must be in
standby mode for at least 20 seconds and the flushing or gas ballast valve
must not have been open during this time. If you want to make sure that a
current internal ground is used in the following measuring operation, do not
press START, until the background display in standby has changed from low
opacity (grayed out) to normal opacity. To make the background display
visible in standby mode, activate the corresponding function, see “Change
general display settings [ } 57]”.
ð Inlet area
Additionally to the deduction of the internal background, pressing START with
every measurement also deducts the background of the inlet area.
IF you would like to switch this on, make sure that the background of the inlet
area is determined, see "Determine the background of the inlet area [
}
73]".
We recommend that the calculation of the inlet area background is
occasionally repeated, because the device pumps down any background
present in the inlet area after a certain time.
ð
Switched off
No background suppression.
3 Save .
High background value
If the actual background is higher than 1×10
-8
mbar l/s, it can no longer be
automatically deducted. The high background must be pumped down in this case.
6.3.13.1 Determine the background of the inlet area
This function determines the value of the internal Helium background.