Inficon 550-520, Translation Of The Original Operating Instructions

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INFICON Description | 4
UL6000-Fab-Operating-instructions-iina75en1-04-(2109) 27 / 146
The actual measured leak rate is considered to be a background signal. Depending on
the selected variant of operation mode the background signal is hidden until the
display limit of the respective vacuum range is reached.
Display limits according to factory setting:
1×10
-1
mbar l/s in MASSIVE
1×10
-7
mbar l/s in GROSS
1×10
-10
mbar l/s in FINE
1×10
-12
mbar l/s in ULTRA
To switch off the function ZERO again, press the buttonZERO for about 2 seconds.
The function ZERO should be activated only if the leak rate signal is stable and no
leak is measured. See also "Set and use the function ZERO [
}
69]".
4.3.2.4 Meaning of the button LEDs
START button LED STOP button LED Meaning
Off Flashing red No connection to the control unit
Pulsing blue Pulsing blue Run-up
Off Green Standby vented (Vent valve open)
Off Blue green Standby pumped out (Vent valve
close)
Pulsing green Off Pump down
Off Flashing green Internal calibration
Flashing green Off External calibration
Green Off Measure
Yellow (warning, faulty
measurement possible)
Off Measuring with warning not
acknowledged
Off Red Error
ZERO button LED
Off No measurement operation
Off ZERO blocked
Blue ZERO off and HYDRO•S off
Green ZERO ON
Yellow ZERO off and HYDRO•S on