Inficon 550-520, Translation Of The Original Operating Instructions

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INFICON Operation | 6
UL6000-Fab-Operating-instructions-iina75en1-04-(2109) 67 / 146
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> Setup > Measurement > HYDRO•S
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Make a selection from:
"Deactivated" (factory setting) if you do not use HYDRO•S and also want to
dispense with manual switchability.
"Manual" if you want to activate or deactivate HYDRO•S by pressing on the
measurement screen. See also "Design of touchscreen [ } 28]".
"Automatic" if you want to use HYDRO•S as much as possible.
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Save .
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After setting HYDRO•S to “Manual” or “Automatic” perform a calibration, see
“Calibrating [ } 75]”.
6.3.6.2 Use HYDRO•S
HYDRO•S manual ü HYDRO•S is set to “Manual”, see “Set HYDRO•S [ } 66]”.
ü Gas type helium (mass 4) is selected, see Select gas [ } 65].
ü Operation mode “Vacuum” is active.
ü Vacuum range ULTRA is reached.
ü Device is in the "Measuring" state.
ü The current leak rate is larger than 3x10
-10
mbar l/s.
ü ZERO is switched off. After switching on HYDRO•S the ZERO can be used again.
See "Set and use the function ZERO [
}
69]".
► Switch HYDRO•S by pressing on or off on the measurement screen. By means
of Stop you always switch off HYDRO•S.
HYDRO•S automatic ü HYDRO•S is set to “Automatic”, see “Set HYDRO•S [ } 66]”.
ü The other requirements for the above-mentioned manual operation are also fulfilled.
ü The leak detector is in the current measurement range for at least 5 s.
► HYDRO•S switches on automatically.
ð HYDRO•S is switched on only once in a measurement cycle (stop / start).
ð You can always switch HYDRO•S on and off, even if the automatic
function is activated.
ð
Manual switching of HYDRO•S deactivates the automatic operation until the
next measuring cycle (stop / start).
6.3.7 Setting the machine factor
If you are measuring in the operation mode "Vacuum" and using an external pump in
parallel, the measured leak rate would be too small in comparison to the leak rate
based on an internal calibration.