Inficon 550-520, Translation Of The Original Operating Instructions

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INFICON Description | 4
UL6000-Fab-Operating-instructions-iina75en1-04-(2109) 35 / 146
Physical data
UL6000 Fab
Minimum detectable leak rate, vacuum
mode
< 5 x 10
-12
mbar l/s
Response time, blind-flanged < 1 s
Response time, 50 l volume ~ 1.4 s
Maximum inlet pressure (Vacuum range
MASSIVE)
Ambient pressure
Helium suction capacity (vacuum range
ULTRA, inlet flange DN63)
> 36 l/s
Helium suction capacity (vacuum range
ULTRA, inlet flange DN40)
~ 30 l/s
Air suction capacity of the backing pump 36 m
3
/h
Time to 1 mbar for 50 l volume < 52 s
Ventilation time, 50 l volume up to 1000
mbar
~ 16 s
Time for calibration < 30 s
Run-up time < 2 minutes
Detectable masses
4
He, H
2
, Mass 3 (e.g. H-D,
3
He or H
3
)
Minimum detectable leak rate,
sniffer mode
< 5 x 10
-8
mbar l/s
Gas flow through sniffer line SL200 25 sccm
Gas flow through sniffer line SL3000 160 sccm
Measurement range 12 decades
Sound pressure level in Standby < 70 dB (A) *)
Ion source 2 long-life iridium cathodes, Yttrium oxide
coated
*) The A-weighted emission sound pressure level at the operator's premises is less
than 70 dB (A) at all times for all foreseeable uses of the device. The noise emission
measurement declaration was drawn up in accordance with the harmonized standard
DIN EN ISO 3744:2011.
Ambient conditions
UL6000 Fab
Max. altitude above sea level 2000 m
Maximum relative humidity 80 % at 30 °C, linear decrease to 50 % at
40 °C
Storage temperature 0°C … +50°C