Inficon 550-520, Translation Of The Original Operating Instructions

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6 | Operation INFICON
66 / 146 UL6000-Fab-Operating-instructions-iina75en1-04-(2109)
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> Setpoints
2
Adjust.
3
Save .
6.3.4 Activate vacuum ranges
Vacuum ranges You can activate the vacuum ranges MASSIVE, GROSS, FINE and ULTRA for your
measurements.
All 4 areas can be activated at the same time. If several areas are activated, they
switch automatically depending on the inlet pressure p1. In this way different
sensitivities can be measured with.
At least one range must be activated.
ü
Operator or Supervisor rights
1
> Setup > Measurement > Vacuum > Vacuum ranges
2
Activate the desired vacuum range under "Vacuum range".
3
Save .
6.3.5 Switch TMP2 mode on or off
ü
Supervisor rights
1
> Setup > Measurement > Vacuum > TMP2
2
If necessary, change the setting of the “TMP2 Mode” field.
ð
Automatic (factory setting)
The TMP2 starts automatically when evacuating and stops when changing to
standby. This is the recommended setting for maximum performance.
ð
Disabled: The TMP2 does not start.
6.3.6 HYDRO•S
If you are testing large test objects during vacuum operation, you can reduce the time
to ready for measurement by using HYDRO•S, see also Operation mode
"Vacuum" [
}
18].
6.3.6.1 Set HYDRO•S
In addition to the basic setting described here, the availability of HYDRO•S depends
on additional requirements, such as the selected operation mode and the operating
state, see “Use HYDRO•S [
}
67]”.
ü
Supervisor rights