Inficon 550-520, Translation Of The Original Operating Instructions

Page: 71 / 146

INFICON Operation | 6
UL6000-Fab-Operating-instructions-iina75en1-04-(2109) 71 / 146
6.3.11 Vent, purge, regenerate
Vent In measuring mode, you use this function to vent the inlet of the device and a test
specimen connected to it after a measurement. Without the suction effect of the
vacuum, a test specimen can be easily changed.
ü
Operator or Supervisor rights
1
> Setup > Measurement > Vacuum > Vent
2
If necessary, change the setting in the "Ventilation delay" field.
ð
“Immediately": If "Immediately" is activated, the ventilation is triggered when
changing to Standby.
ð “Manually“: Factory setting. If “manually” is activated, the ventilation is
activated after a longer press on the button Stop or by pressing at in the
window “Standby“. See also "Switching on [
}
51]".
ð
"No ventilation”
3
If necessary, change the setting in the "Soft ventilation" field.
ð
Option activated: The inlet is ventilated only very slowly. This can be useful to
avoid a strong flow in the test object, which could possibly entrain particles.
ð Option deactivated: Factory setting
4 Save .
Purge By activating the flushing function (with dry backing pumps), a small gas flow is let into
the backing pump in the "standby" state. The function may be useful to remove
condensed water vapor from the pump chamber of the backing pump or to reduce the
helium background.
WARNING
Risk of suffocation due to nitrogen or argon as purge gas
The use of nitrogen or argon as purge gas may cause suffocation at high
concentrations in indoor air.
► Take precautions to avoid high concentrations of these gases in enclosed spaces.
► Connect an exhaust gas line.
► Make sure that the pressure in the gas line to the purging gas connection does not
exceed 100 mbar gauge pressure above atmospheric pressure.
You can automatically purge the backing pump for 20 seconds when you change to
"Standby".
ü
Operator or Supervisor rights
1 > Setup > Measurement > Vacuum > Purge